VLSI Fabrication Principles

Integrating discussion of elemental (silicon) and compound (gallium arsenide) technologies, this monograph explains why the two materials are particularly suited to Very Large Scale Integrated (VLSI) schemes. The fabrication principles for circuits such as CMOS, MOS and PET are emphasized. VLSI Fabrication Principles: Silicon and Gallium Arsenide, 2nd Edition Fully updated with the latest technologies, this edition covers thefundamental principles underlying fabrication processes forsemiconductor devices along with integrated circuits made fromsilicon and gallium arsenide. Stresses fabrication criteria forsuch circuits as CMOS, bipolar, MOS, FET, etc. These diversetechnologies are introduced separately and then consolidated intocomplete circuits.