Spatial Light Modulators and Applications for in Coherent Communication, Adaptive Optics Maskless Lithography

Optical MEMS (micro-electro-mechanical systems) devices have been used in a variety of applications including fiber-optic communications, projection TVs and in biomedical imaging. MEMS-based spatial light modulators (SLM) provide a compact, large scale, and cost-effective solution to these and other applications. In this book, we introduce the design and fabrication of SLMs for three such applications; coherent communication, adaptive optics and maskless lithography. This book should help not only those engineers working on these applications but in other fields, such as biomedical imaging, to better understand SLMs and their capabilites. This should also help optical MEMS engineers and those new to the field to gain some knowledge on the design and fabrication process for developing MEMS mirror arrays.