Introduction to MEMS

Nestled within our smartphones, automobiles, medical devices, and industrial systems are microscopic machines-Microelectromechanical Systems, or MEMS-that sense, actuate, and control the environment around us. This book, Introduction to MEMS, is designed to be the comprehensive guide on understanding with interdisciplinary technology, providing a structured and thorough foundation in the principles and practices that underpin this dynamic field. This text is structured to logically build knowledge from the ground up, mirroring the development process of a MEMS device itself. We begin by defining the field and its unique characteristics, establishing the "what" and "why" of MEMS technology. From there, we delve into the fundamental physics of MEMS mechanics, providing the essential toolkit of stress, strain, and material properties needed to understand device behaviour. The core of the book is dedicated to the intricate world of MEMS fabrication, with dedicated chapters walking through each critical steps: Deposition Techniques, Photolithography, LIGA Etching, Bonding, Micromachining processes, 3D Printing, MEMS polymers and sensors.